Developments in Surface Contamination and Cleaning - Vol 3

Developments in Surface Contamination and Cleaning - Vol 3

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The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. Feature: Comprehensive coverage of innovations in surface contamination and cleaning Benefit: One-stop series where a wide range of readers will be sure to find a solution to their cleaning problem, saving the time involved in consulting a range of disparate sources. Feature: Written by established experts in the contamination and cleaning field Benefit: Provides an authoritative resource Feature: Each chapter is a comprehensive review of the state of the art. Benefit: Can be relied on to provide insight, clarity and real expertise on up-to-the-minute innovations. Feature: Case studies included Benefit: Case studies help the reader see theory applied to the solution of real-world practical cleaning and contamination problems.The inverter consists of three legs, each consisting of two MOSFETs (1.2 kV/4.5 U ). Each leg provides a phase voltage ... be modified for higher voltage up. FIGURE 5.16 Block diagram of an EDS power supply FIGURE 5.17 Schematic diagramanbsp;...

Title:Developments in Surface Contamination and Cleaning - Vol 3
Author: Rajiv Kohli, Kashmiri L. Mittal
Publisher:William Andrew - 2011-03-25

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